Geri Dön

On-chip compensation of stress, temperature, andnonlinearity in a mems gyroscope

Başlık çevirisi mevcut değil.

PDF İndir

  1. Tez No: 719261
  2. Yazar: ERDINC TATAR
  3. Danışmanlar: DR. JASON GAO
  4. Tez Türü: Doktora
  5. Konular: Elektrik ve Elektronik Mühendisliği, Electrical and Electronics Engineering
  6. Anahtar Kelimeler: Belirtilmemiş.
  7. Yıl: 2016
  8. Dil: İngilizce
  9. Üniversite: Carnegıe Mellon Unıversıty
  10. Enstitü: Yurtdışı Enstitü
  11. Ana Bilim Dalı: Belirtilmemiş.
  12. Bilim Dalı: Belirtilmemiş.
  13. Sayfa Sayısı: Belirtilmemiş.

Özet

Özet yok.

Özet (Çeviri)

The micro-gyroscope performance has improved throughout the years as a result of extensive research, and advancements in fabrication technologies and readout electronics. Today the performance has reached to a point where the environmental effects play a significant role on the gyroscope drift. This thesis proposes on-chip stress, temperature and nonlinearity compensation techniques for high performance MEMS gyroscopes to further improve the gyroscope stability without sacrificing the noise performance. Long term drift limits the performance of the micro-gyroscopes. Temperature has been found to be one of the important sources of long term drift. But constant temperature testing of one of the state of the art gyroscopes still exhibits long term drift. The main motivation of this thesis is solving the long term gyroscope drift problem by measuring the stress of the mechanical structure with on-chip stress sensors. Towards that end, a methodology that couples finite element analysis and circuit simulation has been developed to understand the stress zero rate output (ZRO) relation. To validate the trends in the simulations, stress tests have been performed on a silicon-on-insulator (SOI) MEMS gyroscope that is in-house fabricated, vacuum packaged, and ovenized. This thesis successfully demonstrates that stress compensation significantly suppresses long-term drift resulting in 9°/hr/√Hz angle random walk (resolution) and 1°/hr bias instability at 10,000 s (around 3 hr) averaging time, which is a seven times improvement over the uncompensated gyroscope output. While stress compensation improves the long term stability, the noise performance of the gyroscope directly depends on the drive displacement. High drive displacement improves the gyroscope signal to noise ratio but also leads to a nonlinear force displacement behavior that is v observable as a hysteresis in the frequency-phase and frequency-amplitude relations. These nonlinearities lead to an amplitude-frequency effect where resonance frequency depends on the displacement. This affects the gyroscope long term stability. This thesis proposes a cubically shaped nonlinearity tuning comb finger design that cancels the inherent softening nonlinearity of the gyroscope by introducing a dc voltage controlled hardening nonlinearity. The functionality of the fingers is demonstrated and, furthermore, cancelling drive nonlinearities at high displacement leads to a better bias instability compared to the same displacement with uncompensated, nonlinear characteristics.

Benzer Tezler

  1. Tez No

    770388

    High Dynamic Range CMOS-MEMS capacitive accelerometer array with drift compensation

    Başlık çevirisi yok

    METIN GOKHAN GUNEY

    Doktora

    İngilizce

    İngilizce

    2018

    Elektrik ve Elektronik MühendisliğiCarnegıe Mellon Unıversıty

    PROF. GARY K. FEDDER

  2. Tez No

    750519

    A mems vibrating ring gyroscope with on-chip capacitive stress sensors for drift compensation

    Uzun dönem sapma doğrulaması için çip içi kapasitif stres sensörlü mems titrek halka dönüölçeri

    BAHA ERİM UZUNOĞLU

    Yüksek Lisans

    İngilizce

    İngilizce

    2022

    Elektrik ve Elektronik Mühendisliğiİhsan Doğramacı Bilkent Üniversitesi

    Elektrik ve Elektronik Mühendisliği Ana Bilim Dalı

    DR. ERDİNÇ TATAR

  3. Tez No

    75145

    Molibden nitrür kaplamaların aşınma davranışı

    Başlık çevirisi yok

    İ.BÜLENT NİLÜFER

    Yüksek Lisans

    Türkçe

    Türkçe

    1998

    Metalurji Mühendisliğiİstanbul Teknik Üniversitesi

    Metalurji Mühendisliği Ana Bilim Dalı

    PROF. DR. SABRİ KAYALI

  4. Tez No

    1

    Ovulasyon indüksiyonu tedavisinde folliküler gelişimin ultrasonografik takibi

    Başlık çevirisi yok

    MERİH BAYRAM

    Tıpta Uzmanlık

    Türkçe

    Türkçe

    1987

    Kadın Hastalıkları ve DoğumGazi Üniversitesi

    Kadın Hastalıkları ve Doğum Ana Bilim Dalı

    DOÇ. DR. MÜLAZIM YILDIRIM

  5. Tez No

    201

    Çimentonun sertleşmesi üzerinde kimyasal komponentlerin etkisi

    Başlık çevirisi yok

    NACİYE TÜRKEL

    Yüksek Lisans

    Türkçe

    Türkçe

    1986

    Kimya MühendisliğiUludağ Üniversitesi

    Kimya Ana Bilim Dalı

    PROF. DR. MUSTAFA CEBE

Geri Dön