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Fabrication of plasmonic nanostructures with electron beam induced deposition

Başlık çevirisi mevcut değil.

  1. Tez No: 401076
  2. Yazar: HAKKI ACAR
  3. Danışmanlar: PROF. DR. L. KUIPERS
  4. Tez Türü: Doktora
  5. Konular: Fizik ve Fizik Mühendisliği, Physics and Physics Engineering
  6. Anahtar Kelimeler: Belirtilmemiş.
  7. Yıl: 2013
  8. Dil: İngilizce
  9. Üniversite: University of Twente
  10. Enstitü: Yurtdışı Enstitü
  11. Ana Bilim Dalı: Belirtilmemiş.
  12. Bilim Dalı: Belirtilmemiş.
  13. Sayfa Sayısı: 102

Özet

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Özet (Çeviri)

The work described in this thesis was shaped by the goal|coming up new approaches to fabricate plasmonic materials with electron beam induced deposition (EBID). One-step, bottom-up and direct-write are typical adjectives that are used to indicate the advantageous properties of this technique. These properties enable us to produce complex, three-dimensional materials even on non- at substrates in a rapid fashion. However, to fabricate plasmonic materials with EBID one needs to overcome some diculties and limitations. The major challenge to solve is the impurity issue of the deposited metallic structures. We circumvent the impurity problem by deposition of silica instead of a metal. Metallic nanostructures are obtained by subsequent conformal thin gold lm coating. At the end of the coating process we obtain a core-shell type plasmonic structure. With this method, as demonstrated in Chapter 3, we fabricate high aspect ratio ground plane dispersive nanoantennas. The characterization of the structures with angleresolved cathodoluminescence (CL) and numerical calculations with nite element modeling (FEM) reveal that the nanoantennas work like their rf counterparts, but now in the visible domain and with an e ective length that is roughly twice their geometrical length. Furthermore, the core-shell structure of the nanoantennas can be exploited to control and tune the optical properties by altering the shell thickness. In other words the method to circumvent the intrinsic problem of EBID of metals yields an unique advantage for plasmonic structures. The capacity to build three-dimensional complex structures is a striking feature of EBID. We exploit this feature to fabricate a plasmonic chiral nanoantanna array composed of three-turn helices. The core-shell structure is achieved with the same method that is used to fabricate the ground plane nanoantennas. As described in Chapter 4, we observe that the fabrication process that requires a signi cant amount of time |like the fabrication of our helix array| can su er from a decreased amount of precursor delivery with time. This decrease a ects the geometry and size of the individual nanostructures. We circumvent this issue by depositing the helix array part by part with certain amount of pause in between the subsequent depositions. We also observed that, given a xed replenishment rate of the precursor, electron beam current and dwell time yield di erent geometries even when the total electron dose is kept constant. In Chapter 5 characterization of the structure is performed with transmission measurements by using circularly polarized light. We demonstrate that our helix array is an optically active material in the visible domain: the transmission depends on the handedness of the circularly polarized light. The results are also supported with numerical calculations. In Chapter 6 we load the gap of plasmonic split-wire gold nanoantennas with the local deposition feature of EBID. The loading is established with silica deposition. The gap eld of the nanoantennas are loaded with various amount of silica. The optical properties of the loaded antennas are investigated with CL spectroscopy. The results reveal that the gap loading shifts the antenna resonance towards longer wavelengths as a function of the amount of deposited silica. Summarizing, light-matter interaction related studies beyond the classical limits of the optics (nanophotonics) is a broad eld. Both fundamental and applied nanophotonics investigations require state-of-the-art nanostructures with various geometries and material properties to push the boundaries. The work in this thesis demonstrates that EBID is an attractive nanofabrication technique to produce nanostructures that are three-dimensional, tunable (active or passive), with di erent materials, on di erent types of surface.

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