Teleoperated 2-D micro /Nanomanipulation using atomic force microscope
Başlık çevirisi mevcut değil.
- Tez No: 767621
- Danışmanlar: Belirtilmemiş.
- Tez Türü: Doktora
- Konular: Fizik ve Fizik Mühendisliği, Physics and Physics Engineering
- Anahtar Kelimeler: Belirtilmemiş.
- Yıl: 2020
- Dil: İngilizce
- Üniversite: The Unıversıty Of Tokyo (tokyo Daıgaku)
- Enstitü: Yurtdışı Enstitü
- Ana Bilim Dalı: Belirtilmemiş.
- Bilim Dalı: Belirtilmemiş.
- Sayfa Sayısı: Belirtilmemiş.
Özet
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Özet (Çeviri)
The target of this thesis is the teleoperated 2-D pushing of micro/nanoparticles and touching interaction at the micro/nano scale using Atomic Force Microscope (AFM) for reducing the manipulation and interaction barrier between macro and micro/nano worlds. For this purpose, a system called Tele-Micro/Nanomanipulator is proposed. In this system, AFM is utilized as the micro/nanomanipulator, and also the 3-D nano scale topology sensor and micro/nano force sensor. As AFM, a home-made open structure AFM system using piezoresistive cantilevers and sensor-integrated closed-loop XYZ positioners is constructed. In the macro world part of the system, a Virtual Reality-based visual and force display user interface is utilized for controlling the motions of the AFM cantilever by a direct teleoperation control or task-based teleoperation control. Shaded images of the AFM scanning <lata are displayed interactively, and a 1-DOF home-made haptic device has been used for real-time micro/nano scale force/tactile feedback and generating motion commands for the AFM cantilever. Between the macro and micro/nano worlds, scaled bilateral teleoperation controllers are proposed taking the scaling and bandwidth effects into consideration. These controllers utilize Virtual lmpedance and force-reflecting position servo controller approaches. Methods are proposed for the selection of the scaling factors for the force and position information. Using the AFM cantilever tip, mechanical contact push/pull, cutting, drilling, and ete. kind of 1-D or 2-D manipulations are possible at the micro/nano scale. Tele-Micro/ N anomanipulator system is focused especially on pushing manipulation and touching interaction. Dynamical modeling and control of the AFM cantilever, and modeling of micro/nano scale forces using continuum mechanics models have been proposed for these applications. Pushing of micro/nano particles are utilized in two ways: 2-D positioning/ assembly of particles on substrates, and tribological characterization of particlesubstrate interfaces. As pushing experiments, gold-coated 2, 1 and 0.48 µm size latex particles are positioned on silicon substrates, and also the frictional behaviour between the latex particles and silicon substrate is observed in ambient conditions. Different behaviours such as pure sliding, stick-slip, or rolling are observed. Furthermore, precise values of shearing forces are measured. For the touching experiments tele-compliance feedback of selected points on silicon and mica surfaces, and tele-tactile feedback of silicon fabricated etched patterns are realized. These experiments show that the system can be utilized for pushing and touching applications at the micro/nano scale, and modeled dynamics and forces correspond with the experimental results.
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