Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments
Nano düzeyde daha hızlı tarama için XYZ hareketli piezo tarayıcının tekrarlı kontrolü: Benzetim ve deney
- Tez No: 285333
- Danışmanlar: DOÇ. DR. ÇAĞATAY BAŞDOĞAN
- Tez Türü: Yüksek Lisans
- Konular: Makine Mühendisliği, Mechanical Engineering
- Anahtar Kelimeler: Atomik kuvvet mikroskobu, Denetim sistemleri, Nanoteknoloji, Atomic force microscope, Control systems, Nanotechnology
- Yıl: 2011
- Dil: İngilizce
- Üniversite: Koç Üniversitesi
- Enstitü: Fen Bilimleri Enstitüsü
- Ana Bilim Dalı: Makine Mühendisliği Ana Bilim Dalı
- Bilim Dalı: Belirtilmemiş.
- Sayfa Sayısı: Belirtilmemiş.
Özet
A Repetitive Controller (RC) is implemented to control the z-axis movements of a piezo-scanner used for AFM scanning and then tested through scan experiments and numerical simulations. The experimental and simulation results show that the RC compensates phase delays better than the standard PI controller at high scan speeds, which leads to less scan error and lower interaction forces between the scanning probe and the surface being scanned. Since the AFM experiments are not perfectly repeatable in the physical world, the optimum phase compensators of the RC resulting this performance are determined through the numerical simulations performed in MATLAB/Simulink. Furthermore, the numerical simulations are also performed to show that the proposed RC is robust and does not require re-tuning of these compensators when the consecutive scan lines are not similar and a change occurs in the probe characteristics.
Özet (Çeviri)
A Repetitive Controller (RC) is implemented to control the z-axis movements of a piezo-scanner used for AFM scanning and then tested through scan experiments and numerical simulations. The experimental and simulation results show that the RC compensates phase delays better than the standard PI controller at high scan speeds, which leads to less scan error and lower interaction forces between the scanning probe and the surface being scanned. Since the AFM experiments are not perfectly repeatable in the physical world, the optimum phase compensators of the RC resulting this performance are determined through the numerical simulations performed in MATLAB/Simulink. Furthermore, the numerical simulations are also performed to show that the proposed RC is robust and does not require re-tuning of these compensators when the consecutive scan lines are not similar and a change occurs in the probe characteristics.
Benzer Tezler
- Kalibrasyon denemeleri ve bugüne kadar İzmir ve çevresinde bazı bitkiler için yapılan gübre önerileri üzerinde araştırmalar
Başlık çevirisi yok
NEVİN PEKTAŞ
- Meteorolojik verilerin ısıl değerlendirilmesi ve bilgisayarda simülasyonu
Başlık çevirisi yok
KAYA SARICALI
- Spor salonlarında tesis büyüklüğüne bağlı olarak program ilkelerinin araştırılması
Formulation of the programme of requiriments related to the capacity of space in sports centers
MERAL ERDOĞAN
- Düşey yöndeki yerkabuğu hareketlerinin duyarlıklı nivelman ölçüleri ile belirlenmesi
Başlık çevirisi yok
MUALLA ÜNVER
Yüksek Lisans
Türkçe
1988
Jeoloji MühendisliğiKaradeniz Teknik ÜniversitesiJeodezi ve Fotogrametri Mühendisliği Ana Bilim Dalı
DOÇ.DR. ERGÜN ÖZTÜRK
